Proof of concept of high-rate decentralized pre-composting of kitchen waste : optimizing design and operation of a novel drum reactor

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Determination of Young’s modulus of poly-SiGe micromachined structures using novel mechanical actuation test techniques

The mechanical properties of multilayered poly-SiGe are determined using cantilever structures and newly designed chariot wheel structures actuated by a surface profiler and a nanoindenter respectively. This set of structures allows the extraction of Young’s modulus, mean residual stress and gradient stress. Standard nanoindentation experiments on thin films are also used to determine the Young’s modulus for comparison.The test structures are surface micromachined using a process flow that minimizes the topography and the underetching effects.info:eu-repo/semantics/publishe

Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural material

In this work stacked boron doped poly-crystalline Silicon-Germanium (poly-SiGe) layers, which can be applied as structural MEMS layers, were studied. A standard 1 µm base layer, deposited at 480 ºC chuck temperature, is stacked until the required thickness (e.g. 10 x for a 10 µm thick layer). This 1 µm base layer consists of a PECVD seed layer (+/− 75 nm), a CVD crystallization layer (+/− 135 nm) and a PECVD layer to achieve the required thickness with a high growth-rate. The top part of this PECVD layer can optionally be used for optimizing the stress gradient by a stress compensation layer. This approach resulted in 4 µm thick poly-SiGe MEMS structural layers with low tensile stress (50 MPa), low resistivity (2 mΩcm) and a low strain gradient (< 1*10¯⁵/µm).status: publishe